MTI CORPORATION, USA

Rotation Powder ALD 4" Tube Furnace System Upto 1200oC - ALD-1200X-R-4

    Product Introduction

  • ALD-1200X-R-4 is a 4"rotation tube furnace combining with two channel
    ALD valves and one channel liquid vapor delivery( Atomic Layer Deposition )
    and as well as four channels gas delivery to make surface coating on
    powder by both ALD and CVD. The smart design makes ALD more
    cost effective and affordable for every research group.

    Control Panel

  • All parameters of Vapor, ALD, and Gas flow are integrented into one mobile cart and controlled by
    PLC via a 6" touch screen panel :
    ▪ Two Channel ALD valve
    ▪ For channels MFC gas delivery

    Please mouseOver picture below to see control interface

    ALD Valve

  • Two Channel ALD valve
  • For channels MFC gas delivery

    Please mouseOver picture below
            

    Liquid-Vapor Generator

  • Automatic liquid vapor generator is included and connect to ALD valve
            

    Rotation furnace

  • Max 1100ºC for continuous heating
  • Two programmable precision digital temperature controllers with 30 segments.
  • Input power: 208 - 240V AC input, single phase at max. 4KW
  • Rotation speed: 0 - 10 RPM
  • 4" quartz Tube as the drawing below

             
        Four Mixing Blades                    Dimension
    









 

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