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MTI CORPORATION, USA
Roll to Roll PE-CVD System for Continuous Graphene or 2D Film Growth - OTF-1200X-II-PE-RR
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Features
OTF-1200X-II-PE-RR is a lab scale Roll to Roll PE-CVD
(Plasma Enhanced Chemical Vapor Deposition) tube furnace system,
which consists of 300W RF plasma source, 80mm O.D two heating
zone split tube furnace at 1200oC Max, 3 channel MFC gas delivery station, and high-quality mechanical vacuum pump, and two vacuum chambers with substrate reeling in and out, as well as touch screen control panel.
The R2R system is designed for exploring flexibility to grow graphene or
other two dimension film continuously for the industry.
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