MTI CORPORATION, USA


Powder PE-CVD System with Powder Feeding & Receiving (5" Tube, 1200C Max.)

- OTF-1200X-III-R5-PECVD
   

      Product Introduction
  • OTF-1200X-III-R5-PECVD is a 1200ºC Rotatable Three -Zone Plasma-Enhanced Chemical Vapor Deposition
    (R-PE-CVD) system which is designed fro powder surface coating to form core-shell structure particles at the relatively lower temperature. The automatic powder feeding and receiving system is built in for continuous powder coating. Temperature, plasma power, and 4 channel gas MFC is controlled by touch screen panel and laptop computer for easy operation
     Specifications :

     System Structure
  • 0~25° adjustable tilt frame assists smooth powder loading/unloading.
  • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma enhanced processing which significantly reduces the needs for high-temperature process
  • Gear-driven tube rotation allows "blending" processing powders to achieve the best processing uniformity
  • Four-channel gas mixing station with MFCs provide precise control of gas delivery
  • Airtight powder feeder and receiver are included for continuous powder coating processing up to 1000 g.
      Three-Zone Rotary Furnace
  • Working temp: 1200°C Max(<1hrs)., and 1100ºC for continuous heating
  • Three digital temperature controllers with 30 segments programmable and +/-0.1°C accuracy.
  • Input Power: 208 – 240VAC, a single phase at max. 4.0 KW.
  • The split cover enables faster cooling and easy operation
  • Three heating zones: 6"+ 12"+ 6", total 24" ( 609 mm)
  • Constant temperature zone: 480 mm length +/-2°C
  • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM
      Plasma RF Power Supply
  • Output Power: 5 -300W adjustable with ± 1% stability.
  • RF frequency: 13.56 MHz ±0.005% stability.
  • Reflection Power: 100W max.
  • Matching: Automatic
  • RF Output Port: 50 Ω, N-type, female
  • Noise: <50 dB.
  • Cooling: Air cooling.
  • Power: 208-240VAC, Single Phase, 50/60Hz
      Quartz Tube
  • One special designed 5'' O.D Fused quartz processing tube is included.
  • Please click the pic below to see dimension
      Click on the picture

      


      Sealing Flanges

  • A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube
  • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline or downstream attachments (such as gas, powder and electrical delivery lines)
             

      Tube Rotation Speed
  • 0 - 5 RPM variable

      Furnace Tilt Angle
  • 0~30°

      Vacuum Pump & Gauge


             

                                    Click on the picture
  • EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale, please click the image on the left to see detail specs.
  • KF25 adapter and stainless steel bellows are connected between pump and tube flange
  • 10E-2 Torr vacuum can be achieved inside the processing tube
  • Note: Vacuum Gauge is available at additional cost, please click underline and to order

      MFC Gas Mixing Station

             

                                    Click on the picture
  • Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control gas flow rate automatically.
    • MFC 1: Gas flow range from 0~100 SCCM
    • MFC 2&3: Control range from 0~200 SCCM
    • MFC 4: Control range from 0~500 SCCM
  • Gas inlet/outlet fittings: 6mm O.D tube fitting
  • Power: 208-240VAC 50/60Hz
  • Stainless steel needle valves for manual ON/OFF control of gas supply.
  • Large PLC touch screen control enables easy flow rate settings

      Volumetric Feeder and Collector Tank

      

                                    Click on the picture
  • EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating with adjustable feeding speed
    0 - 97 ml/minute. Please click the pic.1 on the left
  • Stainless steel collection tank ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air. Please click the pic.2 on the left to see details
      Dimensions & Weight

      

                                    Click on the picture
  • Furnace: 2800mm L x 800mm W x 1700mm H (with lid opened); Gas Mixing Station: 600mm L x 850mm W x 700mm H; the measurement is measured approximately.
  • Net weight: 400 Lbs.
  • Shipping Weight: 500lbs.

 

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