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MTI CORPORATION, USA
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Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max) - VTC-300USS
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Product Introduction
VTC-300USS is a cost-effective ultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process on a
large substrate up to 12". The system consists of (1) a 12" spin coater with the vacuum chuck, (2) compressed air
assisted ultrasonic spray nozzle mounted on a swing arm, (3) a heatable syringe pump, and (4) a heat lamp system
for substrate heating
Specifications :
Features
- Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrate
- Applications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned / uneven substrate.
- The system also works on spin alone and spray alone modes
Spin Coater
1 / 4
VTC-300USS spinner
2 / 4
VTC-300USS Chuck
3 / 4
EQOFP14.6.1
4 / 4
VTC-300USS flow meter
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- Vacuum chuck with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square
- One oil-less pump for the vacuum chuck is included and controlled by the spin coater
- Spin speed: 300 - 3000 rpm adjustable
- For safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8"
Ultrasonic Spray Nozzle
- One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is included
- Two spray nozzles with the KF-25 adapter are included. (Click the first picture from right to see details)
◽One cylindrical type -- narrower spray ~20 mm diameter
◽One cone type -- wider spray ~40 mm diameter
- Recommended compressed air pressure for the aqueous solution: ~2 psi
- One flow meter is integrated for regulating and monitoring the compressed air flow
- Fluid viscosity range: 1 - 50 mPa-s (cP)
- One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range
Heatable Syringe Pump
- A heatable syringe pump with LCD touch screen control is included for delivering liquid to the ultrasonic nozzle
- One 50 mL syringe is included for immediate use. The unit can accommodate syringe with 0.4 - 30 mm diameter
- Pumping rate: 0.1 - 45 mm/min adjustable (0.08 mL/min - 35 mL/min for the included 50 mL syringe)
- Flexible Polyimide heater with 30 segments programmable temperature controller is built-in for heating up to 75℃
Heat Lamp and Control
- Duo heat lamps (1000 W max power. Up to 80 ℃) with thermocouple and temperature controller can be ordered at extra cost for heating substrate by radiation (up to 65 ℃ with 12" metal substrate)
Optional
- MTI strongly suggests you place the spin-spray coater inside a fume hood for health and safety concerns. The spin-spray system without heat lamp can fit into MTI's bench-top fume hood (Click Pic 1 to order)
- For the above application, an independently controlled, a two-channel heatable syringe pump can be ordered at extra cost to replace the standard syringe pump (Click Pic 2 to order)
- Customized Multi spray head is available upon request ( pic 3 )
Click on the images below:
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Utility Requirement
- Power: 208 - 240 VAC, 50/60 Hz, 3000 W in total
- Gas: ~2 psi compressed air for the ultrasonic nozzle. Air compressor is also available for order at MTI
- Attention: If a gas cylinder is used instead of air compressor(pic2), a two-stage pressure regulator(pic1) must be installed on the gas cylinder to limit the pressure within the required working range for safe operation.
Click here to learn the installation of a gas regulator.
Net Weight
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